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Mems Silicon-based Permanent Magnet Thin Film Array Design And Preparation Of Study

Posted on:2004-01-11Degree:MasterType:Thesis
Country:ChinaCandidate:Q WuFull Text:PDF
GTID:2192360095960376Subject:Materials Physics and Chemistry
Abstract/Summary:PDF Full Text Request
The distribution of magnetic field in a permanent magnetic thin film array is investigated by analytical calculations in this thesis. Theoretically, the effects of the size of array units and of the distance between them are calculated, especially the contribution of adjoining array units. Based on the theoretical calculation and the magnetic performance index, so-called "effective magnetization intensity", an optimized scheme for a permanent magnetic thin film array is proposed, which is "given 10μm thickness film, the optimized size of the units is 40μm×40μm, while the distance between them is 10μm" Finite element methods is employed to characterize the magnetic properties of a permanent magnetic thin film array with magnetic anisotropy. The results justify the hypothesis of homogeneous magnetization in analytical calculations. The dependence between the thickness of a thin film and the force imposed on the film by a magnetic field is analyzed too.Permanent magnetic thin film array is fabricated by modified low-temperature electroplating processing, which overcomes the common shortcomings like weak adhesion. CoNiMnP samples, thicker than 10μm, are fabricated with smooth and flat surface, good adhesion and considerable perpendicular magnetic anisotropy.Vertical, Hc =59.7KA/m,Br=0.53T,(BH)max=11.3KJ/m3;Parallel,Hc =27.8KA/m,Br=0.42T,(BH)max=3.2KJ/m3。...
Keywords/Search Tags:Permanent Magnetic, Thin Film, Film Array, Finite Element Methods, Electroplating, CoNiMnP
PDF Full Text Request
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