This paper is mainly the research on the design techniques, facture technics, non-linear self-emendation and temperature-bias self-compensate techniques of dif-pressure sensors.The paper first gives the theory of dif-pressure sensors , and the design of its complex sense chip (dif-pressure , static pressure , temperate) and macrostructure. Have been several key techniques of making dif-pressure sensors such as plane technics , minuteness engine machining, static sealing etc.In the paper in the intellectualized researching field there are two ways which are examine-form, curve simulanting, to carry out dif-pressure sensors non-linear self-emendating; adopt the several curves approaching and curve simulating to achieve the aims of dif-pressure sensor error self compensation. Therefore, it providing referenced values of ways and directions for sensor system directing on . |