Study Of AWG Device With Tir Mirrors Based On SOI

With the rapid development of communication technology and business,DWDM technology is considered to be the key method to solve problems in high-capacitance optical fiber communication. Research on WDM devices is highlight nowadays. WDM devices are key components in all-optical network,and play an important role in optical fiber communication. The numbers of multiplexing channels include 2,32,64,256 and even larger. The technologies of WDM devices include thin film,fiber grating,hologram grating,arrayed-waveguide grating (AWG),in which AWG is considered to be the most promising DWDM device.SOI (Silicon-On-Insulator) is a kind of applicable material. The fabrication technology of optical devices based on SOI is compatible with that of microelectronics,so the material cost is low,and the application range is wide. In this thesis,we design and analyze a novel type of AWG device with total internal reflection (TIR) mirrors based on SOI,which has characteristics of polarization compensation and compact structure. This structure is different from the conventional Smit AWG device. This device realizes the function of polarization compensation by utilizing the phase difference of TE and TM modes reflecting on the TIR mirror.The design of the AWG device with TIR mirrors is based on the structure of Smit AWG device. The polarization compensation of TE and TM modes in the AWG device is analyzed numerically. The analytical result of the TIR mirror shows that this type of AWG device with TIR mirrors has high fabrication tolerance. The tapered waveguide and the output waveguide of the device are designed and improved. Simulation results indicate that introduction of tapered waveguides with different widths and design improvement of the output waveguide can both improve the performance of the AWG device.We use wet etching and RIE to fabricate the AWG device with TIR mirrors respectively. We use the test system in our laboratory to test the sample chip. Test results show that the device can realize function of multiplexing,which means that our design is feasible,which has characteristics of easy fabrication,compact structure and small size.