Research And Development Of UDP Real-time Monitoring System Based On LabVIEW

This paper adopts virtual instrument design method and takes LabVIEW, the graphical development platform as technical core to develop magnetron sputtering real-time monitoring system, realize the acquisition and subsequent processing of each important parameter during the magnetron sputtering; builds complete historical database, and provides original data support to the improvement of coating technique and the system's ultimately realization of fuzzy control. The paper mainly discusses the following aspects:1. Analyzes the technology principle and performance of magnetron sputtering ion-plating technique, puts forward the general design scheme of real-time monitoring system, makes preliminary division to system functions, and establishes the development environment and development tools of software.2. Describes the key technique involved in development process of system software. The working efficiency of CPU is improved and the execution of multitask in the system is ensured through multitask planning strategy; the problems involved in high speed data acquisition is solved by applying buffer technology, high speed disk storage technology and special sampling technology.3. Builds the system database and expatiates the method of accessing systemdatabase interface under Lab VIEW environment.4. Makes further division to the function modules of the system, and fulfills the programming of functions like vacuum control, technique flow monitoring, technique trend display, technology setup and fault alarm processing.