Research On Feedback Device With Micro Actuator In Ultra-micro Mass Measurement System

As one of the important advanced problems of modern technology, micro and ultra-micro measurement are the important means by which the human-being explores the microcosm. This paper presents a new method of ultra-micro mass measurement, it measures ultra-micro mass by means of converting it into ultra-micro displacement.Based on research of ultra-micro mass measurement in MEMS, this dissertation mainly studied the feedback equipment with micro actuator of the ultra-micro mass measurement system. First, this dissertation analyzes the developing and researching status of the ultra-micro measurement technology. It describes the piezoelectric effect and the converse piezoelectric effect and also gives out the corresponding mathematical expression. And then it illustrates the principle and the internal structure of piezoelectric ceramics. It analyzes the characteristics of piezoelectric ceramics such as hysteresis, nonlinearity and temperature etc. Following it, this dissertation emphasizes the study of the piezoelectric ceramic driving method and the driving power technology.On the basis of sufficient research of the piezoelectric ceramics, this dissertation designs the driving circuit of the piezoelectric ceramics, which including high-voltage DC-stable power and high voltage linear amplifier circuit. This paper presents a new method to build high voltage DC power by means of connecting power circuit in series and to build high voltage linear amplifier using high voltage amplifier PA85. To make the circuit simple and stable, this paper using ICs such as LM317, OP07 and PA85 etc. This paper also researches the method to compensate the error aroused by the hystersis and nonlinearity of the piezoelectric ceramic.Finally, this paper deals with the typical data using polynomial interpolate method in MATLAB, and builds the section linear model. Then the paper compensates the piezoelectric ceramics and analyzes the result. Then this paper brings the compensated mode into the whole system and finishes the simulation and analysis.Aside, this dissertation also presents the circuit performance testing data, which accords with the design index.