Research On The Preventive Maintenance Cycle Of Semiconductor Production Line

The rapid development of modern science and technology as well as the escalation of market competition has brought about unparalleled opportunity and challenge to the semiconductor manufacturer. In order to improve their ability of competition, manufacturers have to take into account the impact of equipment failure on the enterprises' productivity, costs, quality, and cycle of provision and occupation rate of market. The research of preventive maintenance (PM) of equipments has received wide attention for its ability to improve production system reliability, enhance utilization rate of whole production line, reduce product costs and accelerate the enterprise's reacting speed to market needThe author carries a thorough study on how to determine preventive maintenance cycle, stating that the preventive maintenance cycle could be determined though three ways. This thesis introduces the significance of preventive maintenance cycle with the lowest average cost of maintenance under market economy. The author studies relationship between expected failure times and preventive maintenance cycle under discrete conditions.Based on thorough understanding of producing process and producing characteristics of semiconductor production line, this paper make an intensive research in preventive maintenance cycle of production equipment, proposed the cost model of equipment preventive maintenance, this model considers the corrective maintenance cost, the preventive maintenance and the production loss cost. As an analysis example of the model, the equipment failure distribution following Weibull distribution is optimized by simulation, according to the different policy approach. The result shows the impact of economic principle on preventive maintenance cycle. Then we research the multi-equipment simulation of preventive maintenance period by extending single equipment model to Five-Machine Six Step Mini-Fab model of semiconductor production line. In the end, it is the conclusion of the thesis and the prospect for the future research work.