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N2-Ar Tube Type Hollow Cathode Discharge Surface Nitriding Space Plasma Characteristic Simulation

Posted on:2012-03-09Degree:MasterType:Thesis
Country:ChinaCandidate:Y P GaoFull Text:PDF
GTID:2180330335973881Subject:Condensed matter physics
Abstract/Summary:PDF Full Text Request
N2 and N2-Ar hollow cathode discharge of nitrogen produced reactive ion (N+, N2+, N), can be used for nitride films, metal surface nitriding.N2 in-depth study of hollow cathode discharge mechanism and discharge parameters at the same time, through the incorporation of other types of nitrogen gas, nitrogen discharge characteristics can be improved to enhance the activity of nitrogen ions.N2 and N2-Ar hollow cathode discharge has an important significance, for example:Nitrogen-doped iron and steel will increase the hardness after it, which is more concerned about the machinery industry.N2-Ar hollow cathode discharge plasma mixture gas ionization method is applied to a variety of light sources, gas discharge electronic devices, lightning research, including application of ionized gas as the working medium developed various types of lasers. This paper has developed a N2-Ar hollow cathode gas mixture discharge PIC/MCC mixture model considered in the model of charged particles (e, N2+, N+, Ar+) and ground state of neutral molecules (N2, Ar) of 24 kinds of reaction. Application of Fortran language with the preparation of a two-dimensional physical model of PIC/MCC program to simulate the N2 and N2-Ar hollow cathode of the physical process in which charged particles moving in an electric field and electric field generated by the self-consistent PIC simulation, particle MCC is a collision process simulation.This article reveals a certain extent, nitrogen-doped argon hollow cathode discharge mechanism, specifically as follows:1.Simulated the N2 tubes to hollow cathode discharge surface nitriding coating of space plasma characteristics. Particle density,average energy, ion radial flow density, electronic collision rate, nitrogen active particles (N+,N,N2+) the distribution of produced rate.2.Simulated the discharge parameters and geometry of hollow cathode discharge which affects the inside surface of the influence of nitride. Study the discharge parameters (V,P) on cathode wall place radial electric field, radial flow density distribution of the influence and geometry which affects the effect of hollow cathode.3.Simulated the N2-Ar hollow cathode discharge effects of surface nitriding coating Many researchers to discharge after aeration Ar particle density number, ion space average energy, ion radial flow density effect.N2-Ar hollow cathode mixed gas discharge, the physical process is more complex and affects with discharge parameters,geometry and proportion of argon. In plasma nitriding materials synthesis and material surface coating has great significance. In this paper the hollow cathode effect of plasma research provides theory basis.
Keywords/Search Tags:plasma, PIC/MCC mixture model, hollow cathode discharge, nitriding coating
PDF Full Text Request
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