| In 1899, Campbell found the secondary electron emission phenomenon. Hereafter,the phenomenon of secondary electron emission has been studied extensively. At the present stage, the secondary electron emission is widely used in all kinds of vacuum components. For example, an application on the electron multiplier and photomultiplier tubes, weak signal input can be millions of times amplified. Utilizing the characteristics and mechanisms of secondary electron emission,people made the image intensifier, scanning electron microscopy, Auger electron spectroscopy and other surface analysis instruments. Moreover,the secondary electron emission has a very important application in TV camera tube,storage tube and other electron beam tube.Electrons who have certain energy bombard target. The target surface emits electrons phenomenon,known as the secondary electron emission. Electrons who bombard the target is called original electrons or primary electrons,electrons emitted from the target is called secondary electron. The ratio of the number of primary electrons and the secondary electron is called secondary electron emission coefficient, expressed by. Secondary electron emission coefficient has an important impact on performance of the vacuum electronic devices. Therefore, accurate measurement of secondary electron emission coefficient has great significance on various types of vacuum electron device design, assess and improvement of the function.At present, measuring secondary electron emission properties of the metal is relatively mature at home and abroad, however, to achieve more accurate measurement secondary electron emission coefficient of the insulator is still relatively difficult. In this paper, we have a detailed study of the previous insulator secondary electron emission coefficient measuring methods of single and double electron guns. We propose defects and shortcomings of methods of single and double electron guns and give solutions. Ultimately, we propose a new method of insulator secondary electron emission. We use three electron guns to measure insulator secondary electron emission.In this paper, firstly, we propose key technologies and solutions to key issues of using three electron guns to measure insulator secondary electron emission. Then, we conduct a feasibility analysis. Thirdly, we use Electron Beam Simulation software to simulate distribution of electric field and electron beam spot. Fourthly, we give power system design of secondary electron emission coefficient measuring device. After the installation of secondary electron emission coefficient measuring device is completed, we conducted emission electron gun performance test. The test has a good result. Finally, we test the secondary electron emission of mica and apply Egun Sharp-Draw Wave software to collect data of secondary electron emission. We get the result of mica secondary electron emission and analyze the error source. |