Experimental Research On Micro-hole Drilling Based On Electrochemical Discharge Machining

Electrically non-conductive materials, such as glass and ceramics etc., have been widely used inthe field of micro devices and MEMS for many years due to its good performance on hardness,thermal stability and chemical corrosion resistance. However, the micro-sized feature’s machining ofsuch materials is a significant challenge. As an innovational method for fabricating brittle andnonconductive materials, electrochemical discharge machining is capable of shaping the part with lowcost, high efficiency, and good flexibility. But for aspects like machining depth and machiningprecision, it can not meet the needs of engineering application. Therefore, the processing method ofmicro-hole drilling based on electrochemical discharge machining is studied in this paper, and relatedresearches are conducted. First, the theory of electrochemical discharge machining is analyzed, thenthe experimental setup is established, and then basic machining parameters are studied. Based onthese, micro drills are used as electrodes in this paper. Electrochemical discharge machining andmicro-hole drilling are combined, and then related researches are conducted. At last, blind holes andthrough holes with more than2mm in depth and less than250μm in diameter were processed. Themain work is as follows:1. Gravity feed device is developed and a whole experimental setup is established including thechoosing of platform, equipments and workpiece.2. Cylindrical tool electrodes are fabricated by means of electrochemical erosion process and basicstudy of electrochemical discharge machining is conducted, including how parameters like machiningtime, voltage, electrolyte and electrode etc. affect the processing result, as the foundation of theapplication study.3. Micro drills are used as tool electrode, and the study of micro drilling based on electrochemicaldischarge machining is conducted. Further research on electrolyte and machining time is done, andparameters like rotational speed of electrode, contact force between electrode and workpiece, the sizeof electrode are studied. At last, optimum parameters are chosen and micro deep through-holes areprocessed.