Experimental Research On MESO-SCALE Metal Structure Based On The Electrochemical Micro-Machining Technology

Electrochemical machining (ECM) is an anodic dissolution process of workpiece in a flowing electrolyte where the shape of the tool as cathode is copied into the workpiece as anode with the removal of the anode ion by ion. ECM becomes an important technology in manufacturing of aviation and weapons because hard material could be machined regardless of its property and there is no stress and recast on the machined workpiece. Furthermore, ECM could machine the material ion by ion and shows its potential in micro-machining system. It will be great significance to thoroughly grasp micro ECM core techniques and develop micro ECM system to fabricate microstructures with the Meso-scale (range from a few microns to a few hundred microns) which exists widely in industry.According to the research work of electrochemical machining technology in many years and the latest research progress on the Electrochemical Micro-machining technology of domestic and foreign, this paper focuses on the following aspects to study in depth:1. Based on the in-depth analysis of electrochemical micro-machining technology principle and technical features, a set of complete digital electrochemical micro machining system was developed independently, which includes four parts: a machine body, a motion control system, detection module and a processing power and which can meet the requirements of electrochemical micro machining.2. According to the theory such as Faraday's law, electrochemical polarization process of electrochemical micro-machining, the anode polarization curve and features under external electric field and so on, the electrolyte composition, nature of supply, machining voltage, pulse width, frequency and other technological factors which affect the key indicators such as machining dissolved locality of Meso-scale micro hole, machining quality of micro hole, space distribution, the forming quality and so on were researched through the foundation process with nanosecond pulse power supply.3. Based on the analysis of electrode/solution interface layer theory, equivalent circuit of electrochemical micro-machining and so on, the technological factors such as processing base voltage, electrode submerged depth, power nature, electrode movement, the machining time and so on which affect electrolytic machining molding precision and the molding mechanism and basic law of quality of micro cylinder electrode (micro tungsten electrode) were studied through the foundation process.