Study On Preparation And Properties Of DLC Films Deposited By PBII

With the development of science and technology, people pay more attention to therequirement of material, especially material surface, which should have better protection,and chemical inertness is good. The most important is that the surface of the material isnon-toxic pollution-free. Stainless steel material is widely used in daily production andindustry, but the hardness is low. DLC film is a kind of carbon film with goodperformance such as low friction and wear resistance, biocompatibility, high hardness,non-toxic, etc. So DLC deposited in the stainless steel can meet above requirements.This paper contains four experiments. Firstly, with the preparation of single type ofDLC film, find the difference of the film performance produced by different pressure,radio frequency, and bias. The second part is the preparation of multilayerDLC/W film and study of DLC/W film performance with different thickness, layersand proportion of W/DLC. The third part was the preparation of Cr buffer layersdeposited by multiple arc magnetron sputtering, and the adhesion of the DLC filmswere characterized to find the best process. Finally, different DLC films with Cr bufferlayers were deposited, and the thickness, adhesion of the DLC films, tribologicalproperties were characterized.The results showed: the density of single-layer DLC was poorer because ofRf–power, so adhesion was poor and performance was not excellent. The higher thebias voltage, the worse the membrane brittleness. The thicker the hardness of multilayerDLC film was larger because the film was thicker; The smaller the multilayer filmlayers was, the easier the film to break; the film adhesion was better with thicker film.The preparation of Cr buffer layers improved the adhesion between the film and thesubstrate. By Cr/W/DLC modified layer preparation and detection, found that the filmhave well antifriction and resisitance to wear performance. The main factors influencingthe film friction coefficient was the film thickness, and the main factors that affect thewearing capacity was the ratio of C2H2and H2,the wear mechanism is contact fatiguewear and the optimization of process was that the ratio of C2H2and H2was120:2, thebias voltage was20kV, thickness was1um、pressure was2Pa and without W.