Slurry Abrasion Characteristic Of Fixed Abrasive Pad

Because of its many advantages, Fixed Abrasive Pad (FAP) becomes the focus in ChemicalMechanical Polishing (CMP) field. To achieve higher material removal rate (MRR) and better surfacequality, performance evaluation about FAP is studied. In this paper, slurry abrasion experiment iscarried out to study the real abrasion process of FAP’s polymer caused by the polished wastes. Andslurry abrasion ratio is adopted to evaluate polymer’s abrasion characteristic. The main work is asfollows:1. The feasibility analysis of experiment was carried out. The slurry abrasion equipment wasdesigned, and the meaning and computational formula of slurry abrasion ratio was explained. Thestandard experiment time was set as5hours, with drying temperature100℃and drying time18hours.Grubbs judgment principle was adopted to process data, and the stability of data was studied throughrepeated experiments. The results show that the repeated error between different samples of the sameexperiment is below5%, and the maximum relative error between different experiments is4.7%.2. The impact of variety, size and density of solid particles and agitator’s rotating speed on flow’scharacteristic in sample’s area was simulated through FLUENT. Results show that particles’ velocityrises with the increase of rotating speed, while falls with the increase of particle’s size, density andslurry’s concentration. On the other aspect, particles become better-distributed with the decrease ofparticle’s size, density, slurry’s concentration and increase of rotating speed.3. Impact of experiment conditions on slurry abrasion characteristic was studied. Sample’s slurryabrasion ratio under different conditions was examined through orthogonal experiment. Resultsindicate that slurry abrasion ration rises with the increase of agitator’s rotating speed, slurry’s densityand temperature; it also shows a nonlinear change with the increase of particle’s density and size. Interms of influence’s significance, agitator’s rotating speed and the variety of particle have significantinfluences on slurry abrasion ratio; particle’s size and slurry’s density have a modest impact, while theeffect of temperature and PH of the slurry is insignificant.4. Impact of polymer’s characteristic on slurry abrasion characteristic was studied. Slurryabrasion ratio of polymers with different hardness, swelling ratios and additive materials wasexamined. Results show that slurry abrasion ratio falls with the increase of hardness while rises withthe increase of swelling ratio; adding bronze and SiC powder will strengthen polymer’s slurry wearresistance, reducing its slurry abrasion ratio, and this effect become more distinct with the increase of addition ratio, meanwhile bronze shows a better strengthening effect than that of SiC.5. Relationship between slurry abrasion characteristic and self-conditioning was explored.Different ratios of triethanolamine was added to the polishing liquid and the corresponding materialremoval rate (MRR) of hydrophilic FAP that embedded with bronze powder was investigated.Through the change of MRR, pad’s self-conditioning process was explored. Combining polishingresults, the relationship between slurry abrasion ratio and pad’s self-conditioning characteristic wasdiscussed. And the results show that the higher slurry abrasion ratio is, the better self-conditioningprocess pad can acquire, resulting in higher and more stable polishing rate.