Preparation Of Transparent Conductive ZnO Thin Film By Chemical Bath Deposition

Zinc oxide is a new type of wide bandgap semiconductor material which exciton bindingenergy reach up to60mev. Zinc oxide stimulated emission blu-ray or near uv light.So it canbe used as an important material in the field of optical recording,and also have the ability as asolar cell and ultraviolet detector probe. Not only that, zinc oxide is a tra nsparent conductivefilm,at the same time it also have excellent pressure-sensitive and gas-sensingproperties.Chemical stability and high temperature resistant performance is also much betterthan the commonly used semiconductor materials. Chemical Bath Deposition (Chemical BathDeposition, CBD) is a kind of film preparation process which can proceed in lowtemperature.Compared with the traditional film preparation method, The operation of theprocess is simple, which can realize quantity production.Especially the deposition temperatureis low, so the substrate material selection can be chose from the current poor toughness ofhigh temperature resistant plastic substrate materials gradually to the high plastic flexiblematerial. This study we tried to use chemical bath deposition deposite the nano-sized ZnOthin film on ordinary glass substrate directly. Due to the unique advantage of the zinc oxideand the chemical bath deposition,They make the flexible touch screens or flexible solarpanels have the possibility of implementation.So we explored the way that using the chemical bath deposition to preparation the ZnOfilms on glass substrate.In this study,we mainly aimed at the every process Parameter ofCBD, including the effects of zinc coating time, source and complexing agent dosage,chemical bath temperature and ph value on the growth of ZnO thin film nucleation. We foundthat the different ph value has remarkable effect on the nucleation of ZnO particles. Thereaction temperature has a significant influence on the growth of thin films. And we detect thesurface morphology by scanning electron microscope (SEM).And we using ultravioletspectrophotometer tested the transmittance of the thin films. Experimental results show thatthe best ratio of the preparation of ZnO thin films by chemical bath solution: ZnCl2dosage is0.01mol/L, the appropriate time is60min and the best pH value=10.8, the reactiontemperature is65℃, the dosage of hydrogen peroxide is5ml.In the end we got the filmthickness in300~900nm and ultraviolet transmittance about25%,and the transmittance ofvisible light wave band is hingher than85%...