Studies On Formation And Process Optimization Of Graphene And Graphene Nano-meshes

In recent years, Nano-carbon material has been developing rapidly with the deepening of related research, among which the graphene and graphene nano-meshes are being widely used in integrated circuit, transparent conductive electrode, field effect transistor, energy storage materials and other fields as an important kind of nano-carbon material. At present, various of graphene and its nano-meshes preperation methods are being used. With the production of high quility and extra size graphene, the chemical vapor deposition is attracting more and more attention. In this paper, the chemical vapor deposition method has been used as the basic experimental method. High quality graphene has been perpared by adjusting the process parameters. In addition, the shortcomings of the traditional chemical vapor deposition method has been analyzed systematically, and Further optimization of the process of the growth and metastasis of graphene has been done. And the main research contents are as follows:(1) The growth and process optimization of graphene:Using high pure copper as the growthsubstrate, during high temperature catalytic pyrolysis of methane, and graphene grows on the copper foil surface. Analysis of the effect of methane and hydrogen on graphene growth has been done in this paper, and tried to improve the quility of graphene by controlling the the concentration ratio of methane and hydrogen. The study on the influence of copper foil surface quality on the nucleation density on graphene in the early growth. In addition, the exploration and research of large area single crystal growth of graphene has been done.(2) The optimization of graphene transfer technology:Research and analysis on the effect of graphene transfer on copper foil surface have been done during the corrosion solution process. A new electrochemical method has been developed to remove the graphene on the lower surface, which is not only too simple to use expensive equipment, but also does no harm to the graphene on the copper foil upper surface in the process of removing the lower ones.(3) graphene nano-meshes preparation:The main methods for preparing graphene nano-meshes in recent years are summarized, and the advantages as well as disadvantages of different methods have been analyzed. The mask effect which caused by the deposition of silicon oxide on copper foil in high temperature process brought about the graphene nano-meshes by one step without lithography.