VO₂Thin Film Prepared By Inorganic Sol-gel Method And Its Performance Study

Vanadium dioxide (VO2) is a widely studied thermal sensitive material which having a thermal induced phase transition property. When the temperature rises to near68℃, the crystalline phase transition occurs, optical and electrical properties of the mutant lead to very important research value in many areas.In recent years, research about VO2has achieved many important progresses in many areas such as smart windows, laser protection and so on.The VO2thin film is been prepared by inorganic sol-gel method, and though the experiment we explored the condition for preparing VO2thin film.Many researches were been done to explore a better prepare VO2thin film condition by change heat treating temperature and time. In this paper, we also discussed the influence of VO2thin film properties by different doping ways and different doping materials.The phase of prepared films was by XRD analysis; surface morphology and film thickness were observed by SEM; the light transmittance under atmospheric temperature and high temperature and phase transition temperature were tested by UV-Vis spectrophotometer. Results show that when the V2O5sol mix with alcohol1:10, the thin film could be prepared by dip-coating method. The better condition to prepare VO2thin film is heat treating temperature550℃, heat treating time4h. Doping by co-melting method has a higher effective doping ratio than doping by mixing. And both of doping method are not ideal.