| ITO Film include electrical conductivity and visible permeability, is applied widely in the domain of the high technology,for instance Liquid Crystal Display, electric Color Display, Solar Cell, Electrochromic Windows etc.The situations of heavy demands of ITO target, the research situations and development trends of ITO targets, microcosmic homogeneous densification mechanism and macroscopical inhomogeneous densification mechanism in hot-pressing process were generally reviewed. Moreover, the differences and sameness between sintering method and hot pressing sintering method for preparation of ITO targets were briefly summarized. On this basis the purposes and significances of the research works of the dissertation were indicated. With the help of X-ray diffraction (XRD), scanning electron microscopy (SEM), etc. progressive analysis and Figure of ITO target.Effects of heat-treatment parameters of powders, isolated materials and cooling rate on hot pressing sintering method of ITO targets were investigated in detail, the results indicate that:the Mould made in YHG material can work normally under high pressure and high temperature of1500℃with isolated materials of THG material; ITO powder were examined at400,500,600,700,800,900,1000℃by X-ray diffraction Basing on the obtained data, crystal lattice constant and solubility of tin oxide in ITO target that calculated by Vegard principle. It was found that the solubility of tin oxide in ITO target was related to temperature, and the solubility of tin oxide in ITO target increase with increase in. temperature. In the process of sintering ITO target,120-150℃/h cooling rate could help to obtained ITO target having a relative density of99.274%and purity99.995%were obtained.in single phase.This paper investigated that in the prosess of the preparation of ITO targets by sintering method, a good actual result was obtained by protection of oxygon atmospheres, adding sintering aid and improving technologic process to prepare ITO targets. |
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