Synthesis, Characterization And Application Of Negative Photosensitive Polyimide

Photosensitive polyimide bestowed ordinary polyimide the good performance ofphotosensitive, which simplified the process of fabrication, meanwhile it still maintainthe excellent performance on the aspects of thermal stability, electrical insulationproperties, chemical stability, mechanical properties and resistance to radiation, all ofabove make the photosensitive polyimide widely applied in microelectronics,micromechanical and other related fields. On the basis of previous research onphotosensitive polyimide, this paper is focus on the synthesis and characterization ofion-type and ester-type photosensitive polyimide, and the results are as follows:1) Synthesized the ion-type photosensitive polyimide precursor successfully bya two-step method, and then analyzed all the factors that may affect the process ofsynthesis, like the structure of main chain, the molar ratio of two monomers, solvents,the content of solid, the addition order, the addition method and the reaction time. Theion-type photosensitive polyimide which we made performed well on the behaviors ofthermal stability and mechanical properties.2) We discussed and optimized the UV lithography process based on thePMDA-ODA and BPDA-ODA main chain type ion photosensitive polyimide, andthen introduced the appropriate photoinitiator to accelerate exposure speed. Besidesthat, we also analyzed the electrical insulation properties of ion-type photosensitivepolyimide, and found that the addition of photosensitive small molecules didn’treduce the good performance of electrical insulation. A series of experiments provedthat ion-type photosensitive polyimide’s photosensitivity and insulation are goodenough for application on the field of microelectronics.3) At last, we analyzed two routes to synthesize the ester-type photosensitive polyimide. And we characterized the ODPA-ODA main chain type esterphotosensitive polyimide, which showed good thermal properties and photosensitiveperformance. The excellent performance forecasted a bright future of the ester-typephotosensitive polyimide.