The Design And Research Of Laser Micromachining Actuator

Laser micromachining is a part of precision, ultra-precision machining can not beignored, now widely used in many high-end laser micromachining areas, such as thesemiconductor industry, LED processing, solar cells, touch screen manufacturing,medical equipment, glass, ceramics processing and a variety of other specialprocessing areas. The dissertation is based on the characteristics of GMM, combinedwith the domestic and foreign researches, based on previous GMA, overcome theirshortcomings, through the comprehensive optimization design, performance analysis,improve all aspects of control research, design a kind of small size, high energydensity, fast response actuator adapted to the laser micromachining andprecision, ultra precision machining field.Firstly, expounded the processing in domestic and foreign present researchsituation and application prospect of the laser micromachining actuator. Thedevelopment process of GMM materials, physical characteristics, performanceadvantage in domestic and foreign for its research and application are introduced.Secondly, introduce the design of the whole structure and working principle of theactuator. Mainly include the design of magnetic circuit and the coil, the optimizeddesign of cooling system and the design of the spring plate and optimized throughexperiments and ANSYS analysis.Simulation analysis of the impact of prepressure, hysteresis, temperature on the actuator performance in order to meet theperformance requirements of the actuator.Then, based on the current model, established the linearized dynamic model forthe laser micromachining actuator which include of constant current source. For thelarge time delay characteristics of the system, PID controller including Smithcompensator and fuzzy PID controller were designed, and through Matlab simulationanalysis and result comparison. The results show that, with Smith Predictor fuzzy PIDcontroller can better meet the drive laser micromachining system to quickly respond to the request.Finally, in the Shenyang Better CNC Machinery Co., Ltd., with the help ofShenyang institute of computing technology, Chinese academy of sciences，finallyindicates that drive repeat positioning accuracy is±1.5um, error of0.5um, satisfiesthe requirement of processing.