The Corresponding Relationships Between The Orientation Of Al Substrate And The Texture Of ZnO Films

ZnO films were prepared on the single crystal Al substrates and the secondaryrecrystallization high purity Al substrates by rf magnetron sputtering method. Thesurface and cross-section morphologies of the ZnO films were observed by the scanningelectron microscope (SEM) and the atomic force microscope (AFM). And the crystalorientation of Al substrates and the textures of ZnO films were measured by the electronback-scattered diffraction technique (EBSD) and the x-ray diffractor (XRD). Thecorresponding relationships between the crystal orientation of Al substrates and thetexture of ZnO films were analyzed. The epitaxial relationships between them and themechanisms were also discussed. It is expected to provide certain theoretical guidanceon the preparation of ZnO thin films.Crystalline ZnO films with wurtzite structure can be prepared on the single crystalAl substrates by the appropriate sputtering process. The prepared ZnO films have goodsurface roughness and the c-axis preferred orientation. The epitaxial relationshipbetween ZnO and single crystal Al{001} and Al{111} planes are{001}<110>//{0002}<> and {111}<110>//{0002}<>. Due to the impact oflattice matching, the ZnO films prepared on Al{111} plane have good characteristicsthan the {001} plane.After90%reduction cold-rolling, the mainly texture components of the deformedAl sample are the typical cold-rolling texture components, such as the S, Brass andCopper texture. Cube texture is found at the beginning stage of recrystallization. Astime goes on, the content of the cube texture increases greatly, and grows as the maintexture component after recrystallization. The abnormal {001}<110> grains are formedduring the secondary recrystallization induced by the great cube texture.It is found that the crystal orientation of Al substrate makes an obviously effect onthe texture of ZnO films while the second recrystallized Al substrates are used. Thec-axis orientation ZnO films are prepared on the secondary recrystallization high purityAl substrate. And with the decrease of small grains, the preferred orientation of the caxis and the surface smoothness are better. On the rolled plate of Al substrate, there aremainly the {001}<110> grains with small angle deviation, corresponding to mainly{0002} plane texture with small amount of {} plane texture of the ZnO thin films.