Nano-fabrication And Nano-manipulation Technique And Application Researches

Lithography techniques with spatial resolutions less than 100 nm have received significant attention over the past few years, largely due to advances in nanotechnology. Scanning probe lithography has emerged as a important branch of lithography. In this dissertation we have develop many of lithography and manipulation methods with AFM.In present dissertation, we introduce a method which uses AFM to lithography on the PMMA thin film .And we have discussed the dependence of scratch depth, fabrication speed and lateral feature size We got some interesting patterns like the nano-channels. And carbon nanotubes were dispersed in traditional organic solvents incorporated with various surfactantmixtures by ultrasonic agitation .And we also use Atomic Force Microscope (AFM) tips to manipulate carbon nanotubes.The local optical field enhancement mechanisms is due to the lens effect, Mie scattering or thesurface plasmon polariton resonance depending on the Nanoscale particle size. These effects can help us to overcome the diffraction limit to fabricate the nano-structure. So we have designed a technology base on femtosecond laser’s local field enhancement effect. Nano-machining of thin gold films was accomplished by coupling 800-nm 130 fs femtosecond laser radiation with a tip in ambient air.During nano-machining of thin gold films, possible factors affecting in this process are discussed like the speed of the fabrication、laser fluence and the gap distance, the feature dimensions increase with pulse energy flux and decrease with the speed of fabrication. And lateral feature size change like the Gaussian distribution when we decrease the gap distance the At last we get the high spatial resolution of (≥10nm) (not possible with standard Nanomachining techniques). Base on the experiment of PMMA ,we find the lateral feature size increase with pulse energy flux. We presume relation of the PMMA feature dimensions and the pulse energy flux is decided by the PMMA’s material quality.In this paper, full 3D finite-difference time-domain (FDTD) analysis was carried out to investigate the field distribution in different tip-sample systems. The effects of different gap distance and laser wavelength on the field distribution/enhancement have been studied. The field-enhancement (FE) change like the Gaussian distribution when we decrease the gap distance. Result indicate that The electric field distribution at the tip exhibits the "antenna-effect" which have lower field enhancement at the tip. When we use the blue laser, "antenna-effect" don’t exist.