Process Detection Techniques In High-precision Wavefront

To improve test precision modern optical system often uses optical element of large aperture. Muti-aperture Overlap-scanning Technique(MAOST) and target function can solve the problem of testing a large optical surface on the basis of ordinary digital interferometer of wavefront, and get the most information of wavefront in the endIn the condition of big Kr, Muti-aperture Overlap-scanning Technique(MAOST) using target function is proved and we can get the most information of wavefront in the case of guarantee of high precision By the aid of simulation,experimental and Tests,many influential factors,i.e.,the apertureconnection mode,shape of mirror , error in subaperture test and Kr are analysed contribute to controlling and testing large optical surface.Moreover,we put forward many schemes to erase errors such as static error,Dynamic error, or make them little.Especially we dicuss how to deal with the phase-shifting cell (PZT) and interferogram.In the end we bring forward two methods to estimate the contour of piano: One is traditional parameter , the other is Power Spectral Density( PSD).