Multifunction Laser Digital Interference Contrast Microscopy System

A multifunctional laser interferometer which can be used to measure the three dimension microcosmic profile and roughness of optical component is introduced in this dissertation. It covers microscopy, polarized interferometry and real-time phase detection Algorithms. Integrating Tynman system with polarized system together, the laser interferometer is compatible for the surface with different reflectance.First, on the basis of synthesizing different interferometric microscope, the author introduced a kind of lase interferometer combining polarized interferometry and real-time phase detection algorithms. First, a kind of optical configuration is introduced, which is realized in the above interferometer. Then, the optical system and mechnical configuration of the interferometer are realized, which are based on phase detection algorithms and four-step algorithm.In the following work, we designed and realized a DC high voltage amplification circuit by MCU, which is used to driver PZT, and presented a new method to measure the nonlinearity of PZT.After that, algorithms about the analysis of interferogram were realized in MATLAB. The related program analyzes the interferogram, and gives the three dimension profile of sample surface.Finally, we applied this system to measure two kind of different samples, and the result of measurement was consistent with that by other method.