Research On The Measurement Of Surface Roughness Based On White-light Interference

Three-dimensional surface roughness measurement is derived from the theoretical development of the surface profile in the aerospace, military, and major research projects are widely used. The phase shifting interferometry is the theory of a typical optical measurement technology, it compared to other traditional methods of measurement, the system is relatively simple, relatively easy to debug, on-line measurement of speed, higher accuracy and can be duty-free measurements. In this paper, phase-shift theory of white light interference measurement system, the whole measurement process including the phase-shifting interferometry, phase extraction, processing of experimental data and so on.This paper describes the three-dimensional surface roughness measuring the significance of technology, today introduced three-dimensional roughness and surface profile measurement of the current situation and development, then describes and compares the three-dimensional surface roughness measurement of a variety of methods. Among them, the main reference to the wider application of the phase two algorithm - phase extraction and phase unwrapping. As a means of precise measurement, phase shifting technique is its biggest drawback of the sensitivity of various error sources, including the phase shift of the phase shift inherent in agency error, the light field which the principle of non-sinusoidal error, the system of its own probe errors, etc., we also were carried out its analysis of the compensation of the error algorithm. Extracted according to the phase information to calculate the height of the image corresponds to the value of each point. Then, using the theory of Gaussian surface profile assessment of the center line of information useful for isolated roughness features. Finally, three-dimensional assessment of surface roughness parameters of the study selected a representative physical parameters measured by the surface height difference between each data point values, integrated values of various parameters to restore three-dimensional surface roughness profile.Experimental system using broadband white-light source of halogen light source as a measurement, CCD sensor image acquisition devices, piezoelectric crystal device as a stepping phase shift to achieve a phase shift of the entire measurement and data acquisition. Finally, the paper analysis and experimental results, theoretical analysis shows the text with the results.