| Sub-aperture stitching, characterized by extending lateral and longitudinal dynamicranges of interferometry, is an important technique for measuring large aperature opticalcomponents with high resolution, high precision and at low cost. The key techniquesconcerned include subaperture division, subaperture wavefront data acquisition and datafitting processing of sub-aperture stitching.Solution methods on related critical issues are first investigated, including selection ofstitching modes and setting of the number of subapertures, and after that a technicalrequirement on reforming the existing test platform is given. Secondly studied are the twoalgorithms of " Stitching in Pairs " and " Error Averaging Method ". On this basis, apractical program for stitching interferometry is compiled. And Finally according to theprogramed algorithms, simulation and experimental stitchings are porformed for testing thealgorithm accuracy. Results show that, the comprehensive errors of theretical andexperimental wavefront stitchings are less than 10-6λand than PV/10 (where PV refering towavefront peak-to-vally value), respectively. Furthermore, experimental research isconducted on the influence of stitching accuracy by sub-aperture overlapping area andstitching modes, with subaperature real-time stitching test for large plano-optic broughtabout.Based on software of Pro/M, a quantitative analysis is performed on the effect ofdifferent support ways of large aperture flat conponents, with an optimum support methodobtained. |
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