| The porous oxide film has been widely used as templates in synthesizing nanostructure materials due to their orderly porous structure. Great attention has been paid to the fabrication and application of the porous oxide film. Therefore, it is very important to study the preparation and properties of the porous oxide film. This dissertation is focused on the preparation, properties and application of porous oxide film. The main contents are arranged as follows.Firstly, Porous anodic titanium oxide (PATO) films were fabricated by anodizing Ti films with different time. Ti films were deposited on glass substrates by direct current magnetron sputtering. The results indicated that PATO film is a polycrystalline Ti10O18. The porous structure and the optical properties of PATO films were influenced by anodization time. Refractive indices of PATO film with anodizing 120 min are lower than 2.0 in visible spectral region, and porosity is about 0.32. Rough surface and voids in PATO film induce the extinction coefficient is more than 0.1.Secondly, the porous anodic aluminum oxide (AAO) film with regular pores on a quartz substrate has been fabricated. The influence of anodization time and pore-widen on the optical properties of AAO films has been investigated. Quartz with AAO films on both sides has been fabricted and has high transmittance. The results show that the reflectance decreases and the transmittance increases with the increase of anodization time and pore-widen. Quartz with AAO films on both sides has high transmittance over a wide wavelength range by eroden with 15min.Finally, silver films with different thicknesses deposited on the AAO templates on quartz substrates (AAOAg) have been fabricated. The influence of thickness on the structure, morphology, optical and electrical properties of AAOAg films has been investigated. We also compared AAOAg film with Ag films deposited directly on quartz substrate (QuartzAg). It is found that the AAOAg film is a partical film when the sputtering time is 10 s. As the sputtering time increases, the structure of AAOAg film changes to network and continuum. The optical and electrical properties of the AAOAg film were quite different from those of the QuartzAg film before forming continuous film. After forming continuous film, the optical and electrical properties of the AAOAg film were approximately the same as those of the QuartzAg film. |
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