The Research On Preparation Of Micro-nano Grid Anodic Aluminum Oxide Template

Porous anodic alumina template has many advantages for simple in preparationprocess, raw material availability and low cost, highly ordered pore arrays andaperture within a certain range can be adjusted, etc.This paper mainly focus on the micro pore diameter of anodic aluminum oxidetemplate preparation method are studied, through lots of experiments affectinganodic aluminum oxide template aperture size, hole spacing, hole neat degree ofthe factors of size (pretreatment technology, electrochemical polishing,etc.)and technological parameter（voltage,current density,types of electrolyteand temperature）.We have Successful obtained the preparation of the aperturein the20-90nm, thickness of oxide film in the200nm to10μ m of highly orderedAAO templates, and the system of pretreatment process was studied, and to adjustthe parameters in the process of oxidation and post-treatment technology ofaluminum surface influence, at the same time by adjusting the differentparameters to obtain the optimal parameter combination to get the bestpreparation technology. Under the condition of different types, differentconcentrations of oxidation electrolyte (sulfuric acid and oxalic acid)anddifferent voltage of aperture, hole spacing and neat degree of the influence ofperformance parameters, such as, in the process of oxidation were analyzed bythe change of current density, temperature changes and the effect of oxidationtime, will be collected in the process of oxidation of the change of the voltageand current drawn chart real-time data for research. By controlling the anodicaluminum oxide template preparation time (t) to control the morphology on thesurface of the oxide film, the preparation time is according to the preparationprocess is divided into three main parts: the first anodic oxidation, time toremove an oxide film, and the second anodic oxidation time. For preparation ofAAO template have been characterized by using scanning electron microscopy SEMand atomic force microscopy AFM, precise measurement parameters are obtained.The experimental results show that:（1）High temperature annealing can effectively remove aluminum internal stress between the grain boundary, make the grain big hole nucleus formationand growth. Electrochemical polishing can effectively remove the oxide layeron the surface of the aluminum and the aluminum surface micro leveling effect,and super flat surface and nano-sized defects, before the high temperatureannealing and electrochemical polishing treatment process to improve thetemplate hole neat degree and out of the hole area.（2） Aperture size is mainly related to the oxidation voltage and oxidationelectrolyte type, the aperture size and the oxidation voltage into theapproximate linear relationship, the greater the oxidation voltage, formed bythe larger the aperture. Best required by different types of oxidationelectrolyte oxidation voltage size is differ, the relationship between the sizeof the different types of acid is: phosphoric acid>oxalic acid>sulfuric acidsulfate electrolyte oxidation under the condition of the preparation of thetemplates and orderly hole aperture size relations is: sulfuric acid <oxalicacid＜phosphoric acid.（3）First oxidation witha strongguiding role forthesecondoxidation, properprolong a oxidation can improve the template hole neat degrees. Secondaryoxidation conditions should be used while the conditions are exactly the same,secondary oxidation time length is related to the thickness of the oxide film.（4）Templates are especially sensitive to temperature oxidation process, keepthe temperature in the process of oxidation stability can reduce the defects inthe appropriate scope, improve the success rate of the preparation and the qualityof the template.