Design And Reliability Analysis Of Ultra-precision Hydrostatic Slides

Ultra-precision machining technology has become an important developing direction of the equipment manufacturing industry, and the key decisions of ultra-precision machining is ultra-precision machine tools which core component is slides. Hydrostatic slides is used widely with high rigidity, high precision, low wear, long life and good vibration absorption damping effect. In this paper, based on the NMM500 Five-axis machine hydrostatic slides designed independently by Guangdong key Laboratory of micro-nanofabrication technologies and equipment, the following four aspects are studied:(1) Analyze and compare all types of hydrostatic slides in detail and comprehensively. Build the three-dimensional model of NMM500 five-axis machine hydrostatic slides, and calculate the parameters of the slides. Then introduce the supply system of the hydrostatic slides and design of the Capillary restrictor in detail.(2) Obtain the deformation curve of the slides after simulating and analyzing the preloads of the bolts for the hydrostatic slides. Analyze the flatness of the actual slides surface, and establish the simplified model of the slides. The mathematical model is built based on related theory of oil film bearing. Then calculate straightness errors of hydrostatic slides.(3) Introduce the heat treatment、surface-scraping treatment、installation and corrections of hydrostatic slides. And detect the straightness error of the surface and movement of hydrostatic slides. Then elaborate the treatment of the measurement data and expression of the results in detail.(4) Design the reliability test and analyze the reliability of hydrostatic guides working in different environmental parameters.Then design orthogonal test to analyze the effect of different environmental conditions on the linear motion of hydrostatic slides, and give the greatest impact factor.