| At present, the large area of functional nanostructure and nanostructure of the coating surface can greatly improve the product performance and improve the quality of products, especially in the solar panels, anti-reflection and self-cleaning glass, and a new generation of large-size high-definition flat-panel display industry has a very large and urgent market demand for large size(m grade scale) uneven rigid substrate Nano-patterning, and has already shown a very broad and huge business prospects. However, the existing nano manufacturing technologies is cannot better meet the needs of industrial-scale production; Therefore, it is necessary to develop new large area of nano devices and methods of the graphical.In order to be able to achieve nano-patterning on the oversized(m grade scale) non-flat rigid substrate, a composite nanoimprinting process has been proposed by our research group,which can suitable for the large size of non-flat rigid substrate nano-patterning, and the research and development of nanoimprinting lithography machine is carried out based on the technology, which can be achieved in large size on the non-flat rigid substrate, high efficiency, low cost and large scale large area of nano-patterning; This thesis introduces the basic principle of the belt-type nanoimprinting process, and mainly complete the overall design and the design of the various functional modules of the nanoimprinting lithography machine, such as embossing modules, bearing pieces and mold feed, racks, etc.Finally, we complete the threedimensional digital modeling of Belt-type nanoimprint lithography machine.It is necessary to understand and predict the photoresist flow and filling behavior in imprint lithography process to obtain high fidelity replication of the template patterns. However, the existing flat nano-imprinting and embossing filling theory model of roll forming nanometer technology is no longer suitable for based on the belt-shaped soft mold nano-imprinting process; So, we need to study on the filling behavior and mechanism of the belt- shaped soft mold nanoimprint, establish a theoretical model; The effect of the aspect ratio, the width of the cavity, the duty ratio and friction coefficient on the deformation of the polymer was detailed analyzed with the help of finite element simulation software; Numerical results present that aspect ratio has a significant effect on the Polymer high. The numerical results are helpful for the optimization of the process parameters,and guide the new nanoimprint technology and equipment research and development.Belt-shaped soft mold as a proposed new stamping process at the core of the process elements, its performance and quality for success or failure has a decisive influence on the new stamping process; Traditional nanoimprinttechnology used Plate type mold and roller mold have already established a more mature design and manufacture methods, while It does not apply to belt-shaped mold. Therefore, we need to develop the research of new mold structure design and optimization, and explore efficient, low-cost manufacturing methods of the belt-shaped soft mold. A new film-type composite mold is introduced which includes the patterning layer and support layer. This thesis is mainly focuses the belt-shaped soft mold nanoimprint process on mold deformation problems, designing and manufacturing it, and finally proposing a new method to use roller mold and plate mold to make seams belt- shaped soft mold and seamless belt- shaped soft mold. |
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