Experimental Study Of Non-continuous Process Tube Wall Surface Microstructure Electrochemical Micromachining

The inner wall surface of the non-continuous micro-structure refers to the surface processed in the regular array of micron-sized large-area micro-structure. The surface texture have some specific function, such as thermal conductivity and hydrophobicity, thus providing great protection for new microelectronic cooling technology and promote the great development of the electronics industry. Micro-ECM technology is an important method of machining surface texture. Unlike conventional machining techniques, electrochemical machining is an anode (workpiece) to "ionic" state dissolves in the electrolyte, so as to achieve the removal of material, the processing of forming a technology component. Due to the electrolysis process based on "ionic" form, a non-contact processing, so limit the mechanical stress, free from material hardness, strength and other properties have does not exist, the tool electrode lossless, suitable for batch processing, etc., so the ECM technology has broad prospects for development in micro-manufacturing.For pipe wall discontinuous micro-structure processing requirements-processed width discontinuous micro-structure of depth 200-500 μm,300-800μm, This paper combined with 3D printing technology, lithography technology for processing of non-continuous micro-structure were explored. This paper focuses on the inner wall of the continuous micro-structural studies of non-main indicators are:working width and depth of processing.Therefore, These two aspects is embraced to do the process research.According to the structure of the inner wall of the non-continuous micro machining requirements with electrochemical micro-machining process characteristics designed to meet the required electrochemical micro-machining experimental platform and a dedicated fixture. Because this article is based on the study of static machining process, so laboratory platform is built on the electrolyte circulation system and fixture design. In the micro electrochemical machining, precision power supply directly determines the final precision of the experiments using high-precision models of Smart Wave SW pulse power for processing. Using different processing voltage, duty cycle, pulse width, electrolyte concentration conditions and other parameters tested and compared findings voltage, duty cycle, NaNO3 concentration,, pulse frequency and voltage wave forms and processing parameters on the micro-structure depth and working width have a significant impact. The depth and width of the micro-machining process structure decreased with the increasing concentration of NaNO3 increases after the first, with the voltage, the duty cycle increases, the pulse frequency is conducive to the improvement of the processing micro-structures depth increases, reduced working width, different voltage wave forms greater impact on processing results.After a number of experiments to explore the various processing parameters on the inner wall of the electrolysis process discontinuous micro-structure, and get the best electrochemical machining technology programs by orthogonal experiment.