Study On Carbon Doped Method For Al₂O₃ Thin Film And Its Emission Characteristics

In this paper, the carbon-doped nanoporous alumina films are prepared by two-step anodic oxidation in ethanol-oxalic acid mixture. X-ray photoelectron spectroscopy(XPS) and scanning electron microscopy(SEM) measurements show that the synthesized films have highly ordered pore arrangements, and this kind of doping method can effectively control the doping concentration of carbon. The photoluminescence(PL) measurements show that the PL intensity of the film has been significantly improved comparing with undoped film, and the PL intensity increases with the carbon concentration. However,the doping has no effect on the photoluminescence law of the aluminum oxide film, the luminescence center is always at a wavelength of 450 nm. When the annealing temperature is 500℃,the PL intensity have reached the maximum value. This means that this work will provide a new idea for doping in the nanoporous alumina film. We analyzed the reasons for the above experimental phenomena with the help of the infrared reflectance spectroscopy and X- ray photoelectron spectroscopy.The thermoluminescence(TL) measurements show that the Al2O3:C film TL peak was changed with annealing temperature and have reached the best peak at 300℃. When the annealing temperature is 500℃, the TL intensity have reached a maximum value. The TL intensity increases with the increase of carbon concentration. The linear scope of the TL dose response of undoped Al2O3 films was 10Gy~50Gy, but the linear scope of Al2O3:C films was increased to 10 Gy~100 Gy.