Design And Research Of On-site Measure System On Magnetorheological Finishing Machine Tool

With the rapid development of science and technology, the requirement of high accuracy optical mirror is rising, traditional manufacture techniques satisfies the demand hardly, kinds of advanced optical manufacture techniques came into being, a representative one of which is Magnetorheological Finishing(MRF). MRF has the ability to produce optical surfaces with high accuracy, high efficiency and low sub-surface damage, and has been applied widely by overseas research institutions. To follow their study, domestic research institutions began their study the development and technics on MRF equipment, in which domain the Precision Engineer Laboratory of National University of Science and Technology(NUDT) is keeping ahead. With the deeper application, demand of accuracy, efficiency and robotization level of MRF equipment is advancing, which needs more research. Based on MRF machine tool developed by the laboratory, this thesis mainly studies on geometric error measure and compensation of high accuracy five-axis machine tool, and workpiece localization applied on MRF, for which a online measure system on MRF machine tool was present. The research has great significance on development of manufacture accuracy and efficiency of MRF equipment.The major research efforts include the following points.1. Design of online measure system on MRF machine tool. Aiming at problems of geometric error measure and compensation of high accuracy five-axis machine tool, and workpiece localization applied on MRF, started with function demand and analysis, the structure of online measure system was designed, which included general design and choices of main components. After accuracy analysis and alignments of measure system, it can satisfy the remand of use.2. Geometric error measure and compensation of machine tool. With multi-object system theory, machine tool was modeled. Based on measure system, a measure methodology of measurement of error of rotary axis of machine tool was present, and simulated studying effects of factors on measure error. Geometric error of machine tool was measured, and compensated by embedding post-processor modification. At last, the comparative experiment of manufacture with error compensation and without that was carried out to prove geometric error measure and compensation methodology developed of manufacture accuracy and performance of machine tool.3. Manufacture of workpiece localization. Based on online measure system, workpiece localization methodology was applied on MRF.ICP algorithm was applied to calculate the pose(position and orientation) of workpiece, and simulated to prove the correctness of algorithm. The changing force and removal function was measured to prove the accuracy of localization algorithm. At last, the comparative experiment of manufacture with workpiece localization methodology and traditional localization methodology was carried out to prove the feasibility and reliability of workpiece localization methodology.