Composite Oxide Superlattices (of Batio <sub> 3 </ Sub>) <sub> M, </ Sub> / (of Srtio <sub> 3 </ Sub> Of) <sub> M </ Sub>] <the Sub > N </ Sub> Growth

In this paper, [(BaTiO3)m/(SrTiO3)m]n superlattice was studied. The main task of the study was to search for the fabrication technique of [(BaTiO3)m/(SrTiO3)m]n superlattices by using the LMBE(Laser molecular beam epitaxy).Superlattice is a rising low-dimensional material which appeared not very long. It has been given more and more attention because its unique characterization and attractive application foreground. After the basic conception of superlattice was showed in this paper, we first discussed the study of superlattice's actuality conditions and developments, as well as its application. In order to have a clear conception of superlattice, the superlattice's energy state theory and basic physics characterization, as well as its sorts were narratedIn the scheme arrangement of the experiment, we acquired the fabrication technique of [(BaTiO3)m/(SrTiO3)m]n superlattice main by using the correlative knowledge of thin film growth and referring to other scientific research results, and meanwhile relating our equipments' actuality conditions. In the course of the experiment, we took full advantage of all kinds of analytical instruments, such as RHEED, AFM, HRTEM, XRD etc.After a numerous experiments about the affections of the substrate temperature and the depositing rate which are two important factors to the epitaxial growth of the SrTiO3 thin film and BaTiO3 thin film, we found that we could obtain the good film crystalline quality and flat film surface when the substrate temperature was 500℃ and deposit rate was the 10?/min.On the basis of the above study and after a series of experiments' demonstration, we acquired the satisfactory results of the fabrication technique of [(BaTiO3)m/(SrTiO3)m]n superlattice by using the LMBE. [(BaTiO3)m/(SrTiO3)m]n superlattice was grown on SrTiO3 (100)substrate and the growth of which was studied with RHEED. The pattern and the intensity oscillations of RHEED showed a layer-by-layer growth mode and good crystalline structure. The results also showed that the interfaces and the surface of the superlattice was very smooth. The analysis results of AFM, HRTEM and XRD verified the above results.At the end of this paper, we discussed the ions' diffusion of superlattice's surface and interfaces. The electricity characterization of our superlattice was also discussed.