Vanadium Oxide Films,

The pure VO₂ thin films and V₂O₅ thin films which undergone difference techniques and annealing processes were fabricated on glass substrates by the method of inorganic SOL-GEL from V₂O₅ powder,and the best preparing process was chosed,the preparing process on Si substrates was also researched,and we got the better method to prepare the VO₂ pure films.The phase-component, micro-structure,optical absorption of the thin films were characterized by XRD,microscope and so on.The investigation from XRD reveals that different oriented VO₂ thin films were prepared from different annealing process.The research of microstructure reveal that VO₂ thin films structure have the oriented configuration and the thin film shows minute details the buildup opposite nearer;VO₂ thin films structure was affected by V₂O₅ thin films.According to UV-VlS absorption analysis,we discovered that the absorption of different annealed samples in ultraviolet and vision region are similar.In this experiment,the research expresses that annealing temperature and annealing time has the influence with the growth of the thin film.With same annealing time,going up to annealing temperature benefits to thin films structure;With same annealing temperature, the extension annealing time also benefits to thin films structure.