Plasma Immersion Ion Implantation And Plasma Magnetic Properties

This thesis is composed of two parts.The first covers the investigation of plasma immersion ion implantation.The second focus on the connection between the theory of the left-handed medium and the theory of plasma.The first part,plasma immersion ion implantation(PIII) root in the conventional ion implantation.Because the plasma immersion ion implantation has more advantages than the conventional ion implantation;ions implant into materials omnidirectionally in the case of plasma immersion ion implantation,then we can solve the problem of the linearity of conventional ion implantation.Therefore plasma immersion ion implantation has a good application in industry.In this chapter,firstly, we introduce the actuality,the advantages and disadvantages of the plasma immersion ion implantation;secondly,we introduce the system of probe which used in this experiment;thirdly,we introduce the plasma source,we have designed a new type of antenna,If we use this new antenna to produce plasma,we can obtain a more uniform plasma in the radial direction;lastly,we introduce the power supply which is used in our experiment,and we also investigate the application of plasma immersion ion implantation in made the P type of ZnO film.We find that this method reduced the density of the electron effectively,we can obtain the P type of ZnO,if we optimize the process ulteriorly.The second part,left-handed materials and negative refraction phenomena have been studied extensively in recent years due to their unique physical properties and novel applications.The reversal of Doppler shift and backward Cerenkov radiation are also unusual physical characteristics arising from left-handed materials.The electric and magnetic properties of materials ate determined by two important material parameters, dielectric permittivity determine the response of the material to the electromagnetic radiation.Generally,εand u are both positive in ordinary materials.While bothεand u are negative in LHM,the index of refraction is negative in such materials. If the frequency of electromagnetic wave is little than the frequency of plasma,when the electromagnetic wave propagate in plasma,plasma will have a negative permittivity,so electromagnetic wave will become to the mode of evanescent wave. Because of the diamagnetic property of plasma,this made us to think that can we make the permeability of plasma to electromagnetic wave also is negative? We used analytic method to deduce and investigate this question,we find that we just can make the permittivity to be negative and cannot make the permeability also to be negative.