Using Plasma Immersion Implantation Modification Of The Materials

Plasma immersion ion implantation(PHI) is a new way of modification for materials recent years.Compare to the conventional implantations,it has the advantage which can overcome the limitation of light effect,besides,it has the advantages of high implantation efficiency,strong handling for three-dimensional objects,and compatible with the IC technology,and has a wide range of applications in the metal,polymer and ceramic's modification.We mainly take part in the process of PHI equipment construction,testing and the wrong handling,and do several kinds of material's modification,analyses the untreated samples and the treated ones.Besides,we do some simulation work using some relating software.AISI 316 stainless steel was doped with N using PHI,and the changes were analyzed,and some new mechanism was also discussed.AISI 304 stainless steel was also implanted with N using PIII.The change which is anti-pitting corrosion between the treated samples and the untreated ones was discussed.The XRD,XPS and SIMS characterization was also analyzed.