| Magnetron sputtering were used to fabricate three kinds of Al-CuO composite thin films, they were CuO-Al two layers, CuO-Al-CuO three layers, CuO-Al-CuO-Al four layers. Respectively, characterization, elemental analysis and thermal analysis were researched, and also the electrical explosion characteristics of the films were measured.The observation of morphology on the surface and cross section of the multilayer film, using Scanning Electron Microscopy (SEM), showed that the particle diameter of the thin film layers increased with the film increasing, and the grain of Al film grew radially outward, and CuO in layered model. The thickness of film is uniform and multilayer structure was clear in multilayer film; The surface roughness of the film through Atomic force microscope (AFM) showed that the film surface was smooth and the roughness was less than lnm; Electron spectroscopy (EDS) analysis showed that the component of the multilayer film was pure, and the only impurities was C element from the air, and the purity of the film was more than 90%; The analysis of X-ray diffraction (XRD) of the CuO-Al layer composite film showed that the CuO film would make the X-diffraction angle (20) of Al film occur 2.5°offset. Differential scanning calorimetry-thermal gravimetric analysis (DSC-TG) combined with thermal analysis showed that the multilayer film had two reaction exothermic peaks at 500℃to 750℃.The electrical explosion experiments of the three composite films were developed and the results showed that analysis of voltammetric curves and temperature curves indicated that heat from bridges film gradually increased with the increase of film layers, and the highest temperature of four layers bridge films reached nearly 10,000 degrees; Power voltage, having a greater impact on the electrical explosion properties of the composite films, larger or smaller, would affect the chemical reactions. The best power voltage to prepare this double-layer film was 40V. |
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