Study On The Effect Of Microstructure On Electrical Performance Of Copper Exploding Foil

As a core component in the in-line explosive train,miniaturization and integration research on slapper detonator is becoming increasingly important as development requires.The exploding foil is a critical component of slapper detonator,responsible for converting the electrical energy input into the kinetic energy of the flyer,eventually igniting and detonating the booster explosive.Improving the energy utilization efficiency of the exploding foil is beneficial to reducing the excitation voltage of the slapper detonator,thereby reducing system volume and achieving miniaturization and integration of the detonator.This study focuses on the actual preparation process and application environment of exploding foils,such as the effects of substrate roughness,temperature,and multilayer structure of exploding foils on their electrical explosion performance.Thin film microstructure refers to the microstructure of materials,the surface morphology,structure,and composition of thin films.In this paper,the influence of microstructure on the electrical explosion performance of Cu explosive foil is studied.Thin film growth was accomplished using magnetron sputtering,and then the exploding foil was patterned using photolithography,dry etching,and wet etching.The phase and structure of the exploding foil were characterized by X-ray diffraction（XRD）,scanning electron microscopy（SEM）,and atomic force microscopy（AFM）.Finally,the electrical explosion performance of each exploding foil was tested using an electrical explosion test platform,and the deposition energy and energy utilization efficiency of each explosion foil were calculated.The main research contents are as follows:（1）Study on the effect of surface microstructure（roughness）on the properties of Cu exploding foil.Preparation of Cu explosion foil on six different roughness substrates.The tests showed that as the substrate roughness increased,the Cu grain size gradually increased,the root-mean-square roughness gradually increased,and the Cu grains exhibited a（111）preferred orientation.At the same time,the resistance increased with increasing substrate roughness.At charging voltages of 1500 V and 2000 V,the Cu explosion foil with a substrate roughness of 23.8 nm deposited more energy than other explosion foils,increasing the average deposition energy by about 44%and 31%,respectively,while the energy utilization efficiency was also the highest,which is 1.44 times and 1.31 times of the average energy utilization efficiency of other exploding foils.（2）Study on the effect of material microstructure（annealing temperature）on the properties of Cu exploding foil.Annealing treatment of Cu exploding foil at 373 K,473 K,573 K,and673 K.The tests showed that with increasing annealing temperature,δ_Cu（111）gradually decreased and Cu grain size gradually increased.Annealing below 573 K resulted in a slight decrease in root-mean-square roughness of the Cu explosion foil,with no significant overall change,while at 673 K,the roughness of the Cu explosion foil increased.Electrical explosion tests at charging voltages of 1500 V,2000 V,and 2500 V showed that the deposition energy of the unannealed Cu explosion foils increased by about 21.67%,24.51%,and 27.71%,respectively,compared with the average deposition energy of other annealed Cu explosion foils,and the energy utilization efficiency was 1.22 times,1.24 times,and 1.28times the average energy utilization efficiency of other annealed Cu explosion foils.（3）Study on the effect of different structural composition on the properties of Cu exploding foil.The preparation of pure Cu exploding foil,(Cu₄₀₀Ni₁₀₀)₆ exploding foil,(Cu₃₀₀Ni₂₀₀)₆exploding foil,(Cu₂₀₀Ni₃₀₀)₆ exploding foil,(Cu₁₀₀Ni₅₀₀)₆ exploding foil,and pure Ni exploding foil has been accomplished.Tests show that all samples exhibit no oxide peaks,good crystallinity,and consistent total thickness,Cu film thickness,and Ni film thickness within the experimental design.At a charging voltage of 1000V,the detonation energy of(Cu₃₀₀Ni₂₀₀)₆ exploding foil is 3.81 times that of Cu explosive foil and 1.45 times that of Ni explosive foil.The energy utilization efficiency of(Cu₃₀₀Ni₂₀₀)₆ exploding foil is 30.96%,which is 1.29 times that of Cu exploding foil and 1.28 times that of Ni exploding foil.Meanwhile,(Cu₃₀₀Ni₂₀₀)₆ exploding foil has a larger explosion area and more complete detonation.