Three-dimensional Micro-operation Movement And Positioning Control

The micromanipulation and microassembly technology is the important component of micro electronic mechanical system application. The research of micromanipulation control is very important to the application of micromanipulation. The Performance of control method and control effect directly influences on the precision and efficiency of micromanipulation. To control the micromanipulation, people usually carry on the way that combines some control theories on the characteristics of micromanipulation, which can be made use of computer and communication technology and micro technology.This article presents two control methods, which have already been realized in our micromanipulation system after we investigate all kinds of international advanced control technologies on micromanipulation, and combines our micromanipulation system characteristics. One method is that using joysticks controls the displacement in three-dimensional way based on the visual feedback, the other is that using PID control theory realizes the automatic displacement based on the raster sensors.This paper mainly presents the control research and application on the micromanipulation as follows:Research the components and the control parts of the micromanipulation system, understand the principle of their control and gain the characteristics of their models.Test the performance of our micromanipulation system displacement, summarize the rules of displacement error and analyze the factors of bringing the error by the experiment data analysis.Illuminate the principle of using joystick controlling three-dimensional worktable displacement, design and implement the project of using joystick controlling the micromanipulation in three-dimensional way. And choose the velocity model of the step motor to control the displacement, which improves the control effect much better. The control effect is proved by the experiment.Illuminate the principle and application of raster sensors, implement the installation and test of raster sensors, realize controlling the raster sensors with computer. And prove the performance of raster sensors satisfies the requirement of our micromanipulation system.Research the close loop control theory and the regular ways of process control.Set up our micromanipulation system transfer function. Choose the PID controller as our micromanipulation system controller and show the fitness of PID controller for our system. Illuminate the theory of PID theory and implement the algorithm of PID computer control.Put forward the scale PID control method based on our system characteristics, which can satisfy the requirement of velocity and precision. Carry on the three unattached PID control loops to control three-dimensional movement respectively, which can improve the steady and robust.Explain the control program of close-loop control system and implement the automation control, which can be proved by the experiments.