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Area Array Ccd High Precision Measurement Application Technology

Posted on:2003-05-05Degree:MasterType:Thesis
Country:ChinaCandidate:L F YangFull Text:PDF
GTID:2192360092496936Subject:Mechanical design and theory
Abstract/Summary:
This article introduces the application of area CCD in untouched measurement of industry, clarifies structure of untouched measuring system and problem needed to resolve in the industry environment, and also gives scheme, structure of system, design of optical system and software in automatic sort systems of substrate by area CCD, by comparing different algorithms of filter, edge detection, subpixel, analysises error of hardware system and algorithm, the best one which can get high accuracy and speed in practice is obtained.
Keywords/Search Tags:area CCD, untouched measurement, error analysis, filter, edge detection, subpixel
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