Closed-loop Solutions Of The Saw Accelerometers

According to the practical problems of SAW accelerometer, this paper deeply researched the basic theory of SAW accelerometer and the structure, the working principle of SAW resonant accelerometer. Then detailedly educed the sensitive coefficient of the SAW accelerometer. Combined with the characteristic of the force producers and the different type of the feedback force, it analyzed the magnetoelectric analog force feedback and the magnetoelectric digital pulse force feedback closed-loop plans. In the electrostatic force closed-loop plan, using the inertia mass of SAW accelerometer as one board of the differential capacity, as it got the electrostatic force producer. And with the pulse width modulation method, linearized the electrostatic force producer. It deeply analyzed the speciality of the electrostatic force closed-loop plan, and worked out the system parameters from automatic control theory and simulation. According to the best selected parameters, it gave the system frequency speciality and dynamic performance.This paper carried the important and fundamental research on the practical use of SAW accelerometer. SAW accelerometer is expected to become engineering and marketable basing on the perfection of this research.