| In this dissertation, a special shape cylindrical target of YBCO is designed and sintered for the Inverted Cylindrical DC Sputtering (ICDS) device.Then, the thickness distribution of the 3 inch size thin films has been simulated. Contrasting the results of simulation and the experiment for depositing the 3 inch thin films by ICDS technique, the center position of substrate and the target is in a 18mm offset, the thickness distribution homogeneity is under 8%.Based on the analyses of the theoretic heat distribution for the radiant heating system, a 3 inch size radiant heater fitting for the requirement is designed and made, whose temperature difference is under 6%. Besides, a 3 inch double-sided epitaxial YBCO Super-conducting thin film has been deposited on LaAlO3(100) substrate with the optimum deposition conditions... |
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