Mems Integrated Design Method Based On The "top-down" And The Key Technologies

Micro-Electro-Mechanical Systems is an enabling manufacturing technology with numerous and diverse applications having a dramatic impact on almost everything from aerospace technology to biotechnology. MEMS is forecasted to have a commercial market growth similar to its parent IC technology. However, the complexities of MEMS design and the high cost of MEMS product slow down this growing. Therefore people are usually looking for new MEMS design methodology or software tools to both improve the quality of MEMS design and reduce the cost of MEMS product.This paper presented a novel integrated design method to realize top-down design of MEMS, according to rapid prototyping and concurrent design methodology in mechanical engineering. In this method, the MEMS design flow from the system level to device and process level was established and proved by the design of micro gyroscope.In the system level, the system modeling characterized by multi-discipline was simplified and solved by lumped-parameter modeling and nodal analysis method. The MEMS component library was constructed through analog hardware description language. The gyroscope was modeled with the component library and simulated under Saber.In the device level, the solid modeling of gyroscope based on Solidworks was driven by the result of the system optimization. The mask layout generation from solid model was realized though the layout interchange standard and application programming interface for Solidworks.Finally, in the process level the fabrication process of gyroscope was established according to Multi-User MEMS Process. The modeling and simulation of surface micromaching was studied and realized through virtual reality modeling language and layout of the device in Caltech interchange format.In conclusion, the design of gyroscope was finished through the presented MEMS design method. The MEMS design problem can be solved by this method.