Interdigital Micro Accelerometer System Simulation

Comb finger accelerometers are one kind of typical MEMS products and have several advantages that make them very attractive for numerous applications. They have high sensitivity, good dc response and noise performance, low drift, low temperature sensitivity, low power dissipation, and a simple structure.The action of accelerometer usually involves several physical effects which are coupled together. It is necessary to build accurate and easy-to-use model for accelerometer. Circuit representation of MEMS which a new methodology for modeling and simulating is adopted.The effect of the parameter of the spring beam on resonant frequency, sensitivity, cross sensitivity of the structure of the accelerometer, the effect of the electrostatic force on the accelerometer, the dynamic performance of the accelerometer are analyzed. Results are proved to be correct by experiments.