The Value Of The Mems High-g Accelerometer Design Techniques

The development status quo of EPW (earth penetrating weapon) and the importance in the national defence construction is introduced briefly. The advantage and development trend of self-adapting fuze are also mentioned.Under the background of EPW, a high-g accelerometer with MEMS technique, which can measure from 1000g to 50000g and stand over 50000g impact, is designed. With the finite element analysis (FEA) software ANSYS, we have performed the stress analysis and mode analysis of the accelerometer structure, confirming stress force, max displacement, mode response of the accelerometer in the 50000g impacting environment, and ensuring the accelerometer to be secure, responsible and to work precisely.Besides the FEA method, the accelerometer has been analyzed entirely with the matrix method, which is useful to optimize the engineering design.