High-temperature Superconducting Thin Film Microwave Surface Resistance Measurement Method

The superconductive technology of the high temperature is more and more widely used because of its extensive superiority . Especially,the High Temperature Superconductive (HTS) film is widely used in electronic field,as its manufacture technology improved continuously. The microwave surface resistance(Rs) is an important parameter of measuring the quality of HTS film. So, it seems particularly important how to measuring Rs of HTS more accurately. At present, many countries is carrying on this research in the world. This thesis is one of the 863 projects in china . A kind of experiment research method is introduced in this paper. It measures the Rs of the HTS film by utilizing a Sapphire dielectric resonator working in TE011+δmode.It measures the change of Q-value of the Sapphire dielectric resonator after loading a HTS film,and the Rs of HTS film can be calculated by a simple equality :Q-1 =A +BRs . This method can measure the Rs of HTS film with high precision ,it can test single film without damage, and it has higher superiority in a batch of testing. This method has been improved many times from begining. We start the research from raising the accuracy of the calibrating physical model in this paper. We can obtain a more accurate calibrating physical model and testing result by improving coupling device of the sapphire dielectric resonator and reducing coupling coefficient. The improved testing device has many advantages such as high Q-value,high sensitivity,high accuracy,good repetition and so on.This method can be used in Rs test of the HTS film with diameter less than 3 inches.