Measurement Of Microwave Surface Resistance Of High Temperature Superconducting Thin Films

This paper is on one of 863 projects. As High Temperature Superconductor (HTS) film is applied more and more widely and its manufacture technology improved continually, it is becoming urgent to measure the microwave surface resistance of HTS film that is one of the most important parameters of HTS film.Sapphire resonator working in TEon+6 mode is used in this paper to nondestructively measure the microwave surface resistance RS of a single piece of HTS thin film at 77K. The microwave surface resistance of HTS film under test can be determined by measuring the change of the unloaded quality factors of the loaded resonator.On the basis of studying the veracity of its calibration technology, a sapphire resonator working at 12GHz was improved and fabricated. And the automatic test system is also founded. The system features high sensitivity and good repeatability and can be successful used to measure HTS film with the dimension varying from O 30 to & 50.The system errors of the measurement results are analyzed in this paper.