Optical Refractive Index And Thickness Of The Test Technology And Research

Based on the measurement method on optical film refractive index and thickness, commonly used in the world, a method which derived from variable angle spectroscopic ellipsometry is used to set the primary standard of optical film refractive index and thickness for national defense.Variable angle spectroscopic ellipsometry(VASE)is a instrument for measuring optical film refractive index and thickness and is a powerful technique for research on new materials and processes. Sophisticated instrumentation and software for VASE data acquisition and analysis are available for the most demanding research applications, while the convenient software enables the use of VASE for routine measurements as well. This thesis gives a basic introduction to the theory of ellipsometry and the difference among various measurements are presented. The object to be tested by VASE is shown. The theory for data analysis is described, and some consideration for VASE analysis are given. Lastly, typical VASE examples for industrial applications and analysis on uncertainty and repeatability are presented in detail.Along w ith t he b uilding u p o f t he p rimary s tandard, t he m easurement r esults o f o ur country will be unified and significantly improved and reach to international advanced standard.