Optical Adaptive Micromirror Design And Manufacturing Process

There are hard restrictions on the application of adaptive optical technology which are caused by the difficulty and high cost in conventional way of deformable mirrors fabrication. With the development of micro-opto-electro-mechaning system (MOMES), it has been possible to fabricate deformable micro-mirror array which is measured in micrometer.Micro-optical adaptive system based on MOMES was analyzed, which is mainly composed of phase controllable micro-mirror array for correcting wave front. It has advantage of compact, light weight and low power consumption and it is very favorable for resisting atmospheric turbulence. Key component, i.e. Active Mirror Device (AMD), was designed.In the 1st chapter, we introduce the main technics and the application of MEMS. Introducing the theory, setting down the structure and choosing the material of AMD are the main points of chapter2. In chapter3, we focus on the flow of the technics. At first, we plate SiO2 on to the Silicon, then design the masks of the AMD and the electrode, after that we produce the AMD through exposal, etching and plating. We test how much movement can the micro-mirror does by using the MODEL SPG-II DIGITAL LASER WAVEFRONT INTERFEROMETER. We put forward some problems which we still can't resolve in the last chapter. All these provided a feasibility basis for the further study of AMD in future.Finally, we get the Micro-Mirror-Array(4x4), and each unit is 3mmx3mm. Through the experiment, we know that the AMD can work from 0~2.2V, and its focus is range from 0.11m to infinite.