| In this thesis, the TbFeCo films were fabricated by magnetron sputtering (MS) system and the technology about magnetron sputtering method is studied in details. The properties of TbFeCo films are analyzed.First, the samples by MS were characterized by XRD and EDAX. The results of experiment indicated that the splash probability of Tb is comparatively higher and the content of Tb in films exceeds the target. In addition, surfaces were observed by AFM and SEM. The appropriate sputtering time, sputtering power and work pressure are needed for improving the quality of films fabricated by MS.Second, optical properties of TbFeCo films are studied by spectroscopic ellipsometry and we study the affect of thickness of Ag to TbFeCo films. Experiment results and Drude model are consistent. We compared the spectrums of Ag/TbFeCo and TbFeCo. The results of experiment indicated that the spectrums of Ag/TbFeCo/Si much more close to the spectrums of Ag for its high reflectivity.Last, the polar kerr magneto-optical effects and magnetism of TbFeCo/Si and Ag/TbFeCo/Si are studied. Experiment results indicated that the magnetization directions of all films are in-plane. |
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