Micro-accelerometer Integrated Circuit Design

In this paper, mainly design the interface circuit of Micro-machined Accelerometer, analyze and design the circuit models in lower level.This paper research and accomplish the following parts:(1) With the typical MEMS software, design and simulate the comb finger accelerometer sensor system. By referring to the practical sensor, to appoint the parameters and process file used in the accelerometer sensor model, build the 2-D and 3-D model. Gained the accelerometer model according to real application, simulate the response when outside acceleration force on the accelerometer from different orientation.(2) Adopting two kinds of closed loop circuit: two-path modulated and switched-capacitor interface circuit. Achieve the simulation of the system combining accelerometer model and signal -detected circuit.(3) Design and simulate the circuit models use in systems in lower level, with the fictitious components library of Metal Oxide Semiconductor transistor, which is offered by software. Fulfill the design of basal analog parts used in circuits, such as, analog switch, voltage/current reference source, clock circuit and control part, operation amplifier, comparator, and analog multiplier, and so on. Taking into account the effects of actual yield process and environmental factors, when design these circuits.(4) Use cadence the software often used in IC design, simulate the above two type circuits in transistor level. Accomplish the function simulation of whole circuits, validate the circuit systems and models has been designed. And analyze some problems in layout design of integrated circuit, considering the factual yield process.The expected target is achieved successfully. At the same time, some elementary function contributes IC's design to the interface circuit of Micro-machined Accelerometer. And it gives a good foundation for IC design of other similar circuits.